Introduction to microfabrication [electronic resource] / Sami Franssila.
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TextPublication details: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.Edition: 2nd edDescription: xiv, 518 p. : illSubject(s): Genre/Form: DDC classification: - 621.381 22
- TK7875 .F73 2010eb
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Includes index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2010. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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