Reliability of MEMS
Reliability of MEMS testing of materials and devices / [electronic resource] :
edited by Osamu Tabata, Toshiyuki Tsuchiya.
- Weinheim : Wiley-VCH, 2013.
- xx, 303 p. : ill.
- Advanced micro & nanosystems .
- Advanced micro & nanosystems. .
First edition 2007.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems--Reliability.
Electronic books.
TK7875 / .R45 2013eb
539.60113
First edition 2007.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems--Reliability.
Electronic books.
TK7875 / .R45 2013eb
539.60113