Micro electro mechanical systems (MEMS)
Micro electro mechanical systems (MEMS) technology, fabrication processes and applications / [electronic resource] :
Britt Ekwall and Mikkel Cronquist, editors.
- Hauppauge, N.Y. : Nova Science Publishers, c2010.
- xii, 391 p. : ill. (some col.).
- Nanotechnology science and technology .
- Nanotechnology science and technology series. .
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Electronic books.
TK7875 / .M5284 2010eb
621
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Electronic books.
TK7875 / .M5284 2010eb
621