Database needs for modeling and simulation of plasma processing
Database needs for modeling and simulation of plasma processing [electronic resource] /
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
- Washington, D.C. : National Academy Press, 1996.
- 64 p.
- The compass series .
- Compass series (Washington, D.C.) .
Includes bibliographical references.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Semiconductors--Design and construction--Congresses.
Plasma engineering--Databases--Congresses.
Plasma engineering--Computer simulation--Congresses.
Electronic books.
TK7871.85 / .D374 1996eb
Includes bibliographical references.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Semiconductors--Design and construction--Congresses.
Plasma engineering--Databases--Congresses.
Plasma engineering--Computer simulation--Congresses.
Electronic books.
TK7871.85 / .D374 1996eb