Silicon science and advanced micro-device engineering II
Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / [electronic resource] :
edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
- Durnten-Zurich : Trans Tech Publications, 2012.
- 311 p. : ill. (some col.).
- Key engineering materials, v. 497 1662-9809 ; .
Includes bibliographical references and indexes.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Silicon--Congresses.
Nanostructures--Congresses.
Microelectronics--Congresses.
Electronic books.
TK7871.15.S55 / H36 2010eb
Includes bibliographical references and indexes.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Silicon--Congresses.
Nanostructures--Congresses.
Microelectronics--Congresses.
Electronic books.
TK7871.15.S55 / H36 2010eb