Low-k nanoporous interdielectrics (Record no. 57372)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01568nam a2200385 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Ree, Moonhor. |
| 245 10 - TITLE STATEMENT | |
| Title | Low-k nanoporous interdielectrics |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Hauppauge, N.Y. : |
| Name of publisher | Nova Science Publishers, |
| Year of publication | c2010. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 67 p. : |
| Other physical details | ill. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Nanotechnology science and technology |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Dielectric films. |
| Topical Term | Microelectronics |
| Topical Term | Porous materials. |
| Topical Term | Interconnects (Integrated circuit technology) |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Yoon, Jinhwan. |
| Personal name | Heo, Kyuyoung. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10675006 |
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