Fundamental principles of optical lithography (Record no. 66481)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01409nam a2200361 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/31 |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Mack, Chris A. |
| 245 10 - TITLE STATEMENT | |
| Title | Fundamental principles of optical lithography |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Chichester, West Sussex, England ; |
| -- | Hoboken, NJ, USA : |
| Name of publisher | Wiley, |
| Year of publication | c2007. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xvii, 515 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits |
| Topical Term | Microlithography |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10300846 |
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