Optical imaging and metrology (Record no. 78180)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01212nam a2200301 a 4500 |
| 245 00 - TITLE STATEMENT | |
| Title | Optical imaging and metrology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Weinheim, Germany : |
| Name of publisher | Wiley-VCH, |
| Year of publication | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxi, 482 p., 35 p. of plates : |
| Other physical details | ill. (some col.) |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Metrology. |
| Topical Term | Intrinsic optical imaging. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Osten, Wolfgang. |
| Personal name | Reingand, Nadya. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10575536 |
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