Introduction to microfabrication (Record no. 83896)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01223nam a2200325Ia 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Franssila, Sami. |
| 245 10 - TITLE STATEMENT | |
| Title | Introduction to microfabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Chichester, West Sussex, England ; |
| -- | Hoboken, NJ : |
| Name of publisher | John Wiley & Sons, |
| Year of publication | 2010. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv, 518 p. : |
| Other physical details | ill. |
| 500 ## - GENERAL NOTE | |
| General note | Includes index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical systems. |
| Topical Term | Electronic apparatus and appliances. |
| Topical Term | Microfabrication. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10419414 |
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