Silicon science and advanced micro-device engineering I (Record no. 99884)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02741nam a2200529 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| 245 10 - TITLE STATEMENT | |
| Title | Silicon science and advanced micro-device engineering I |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Stafa-Zurich ; |
| -- | Enfield, N.H. : |
| Name of publisher | Trans Tech Publications, |
| Year of publication | 2011. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xii, 282 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Silicon |
| Topical Term | Nanostructures |
| Topical Term | Microelectronics |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hanaizumi, Osamu. |
| Personal name | Unno, Masafumi. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10604228 |
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