Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Sumio Hosaka.

By:

International Conference on Advanced Micro-Device Engineering (3rd : 2011 : Kiry�u-shi, Japan)

Contributor(s):

Hosaka, Sumio

Material type:

TextSeries: Key engineering materials ; 534Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications, [2013]Copyright date: �2013Description: 1 online resource (277 pages) : illustrationsContent type:

text

Media type:

computer

Carrier type:

online resource

ISBN:

9783038139201 (e-book)

Subject(s):

Genre/Form:

Electronic books.

LOC classification:

T174.7 .I586 2013eb

Online resources:

An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references and indexes.

Description based on online resource; title from PDF title page (ebrary, viewed October 31, 2013).

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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