Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.
Material type:
TextSeries: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: xii, 391 p. : ill. (some col.)Subject(s): Genre/Form: DDC classification: - 621 22
- TK7875 .M5284 2010eb
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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