Atomic layer deposition [electronic resource] : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.].

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TextPublication details: Hoboken, NJ : John Wiley & Sons, c2013.Edition: 2nd edDescription: xv, 253 p. : illSubject(s):

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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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