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Nanoimprint technology [electronic resource] : nanotransfer for thermoplastic and photocurable polymer / editors, Jun Taniguchi ... [et al.].

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Material type:

TextSeries: Wiley microsystem and nanotechnology seriesPublication details: Chichester, West Sussex, U.K. : Wiley, c2013.Edition: 1st edDescription: 1 online resource (xiv, 221 p.) : illSubject(s):

Genre/Form:

Electronic books.

DDC classification:

621.381 23

LOC classification:

TK7874.843 .N36 2013eb

Online resources:

An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references at the end of each chapters and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

Description based on online resource; title from title page (ebrary, viewed June 21, 2013).

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