Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor.
Material type:
TextSeries: Engineering tools, techniques and tables | Nanotechnology science and technology seriesPublication details: New York : Nova Science, c2011.Description: xii, 284 p. : ill. (some col.)Subject(s): Genre/Form: DDC classification: - 621.3815/31 22
- TK7872.M3 L58 2011eb
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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