Transmission electron microscopy in micro-nanoelectronics [electronic resource] / edited by Alain Claverie.
Material type:
TextSeries: Nanoscience and nanotechnology seriesPublication details: Hoboken, N.J. : John Wiley &Sons, Inc., ; London : ISTE, 2013.Description: xiii, 243 p. : illSubject(s): Genre/Form: LOC classification: - QH212.T7 T73 2013eb
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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