Ion implantation and activation. Volume 3 / Kunihiro Suzuki.

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TextPublisher: Sharjah : Bentham Science Publishers, 2013Description: 1 online resource (212 pages) : illustrationsContent type:

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Includes bibliographical references and index.

Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014).

Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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