NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai.
Material type:
TextSeries: Advanced materials research ; v. 254.Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications, [2011]Copyright date: �2011Description: 1 online resource (233 pages) : illustrations (some color)Content type: - text
- computer
- online resource
- 9783038136095 (e-book)
- 233 23
- TK7875 .I538 2011eb
Includes bibliographical references and indexes.
Description based on print version record.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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