Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.

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TextPublication details: Amsterdam ; Oxford : Elsevier, c2005.Description: xii, 312 p. : illSubject(s):

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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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