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FBAR, MEMS and NEMS resonator design and applications [electronic resource] / Humberto Campanella.

By:

Campanella, Humberto

Contributor(s):

ebrary, Inc

Material type:

TextPublication details: Boston : Artech House, c2010.Description: xv, 345 p. : illSubject(s):

Genre/Form:

Electronic books.

LOC classification:

TK5981 .C36 2010eb

Online resources:

An electronic book accessible through the World Wide Web; click to view

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Includes index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2010. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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