@book{131395,
	author = {International Conference on Microtechnology and MEMS and Dai, Minli.},
	title = {Modern development in materials, machinery and automation :},
	publisher = {Trans Tech Publications,},
	year = {[2013]},
	series = {Applied mechanics and materials ;},
	address = {Durnten-Zurich, Switzerland :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10777760}
}