TY - BOOK AU - Dai,Minli ED - International Conference on Microtechnology and MEMS TI - Modern development in materials, machinery and automation: selected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China T2 - Applied mechanics and materials SN - 9783038261469 (e-book) AV - TA403.6 .I586 2013eb PY - 2013///] CY - Durnten-Zurich, Switzerland PB - Trans Tech Publications KW - Materials KW - Technological innovations KW - Congresses KW - Automatic control KW - Electronic books N1 - Includes bibliographical references and indexes UR - http://site.ebrary.com/lib/rucke/Doc?id=10777760 ER -