@book{131403,
	author = {International Conference on Advanced Micro-Device Engineering and Hosaka, Sumio.},
	title = {Advanced micro-device engineering III :},
	publisher = {Trans Tech Publications,},
	year = {[2013]},
	address = {Durnten-Zurich, Switzerland :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10777794}
}