01766nam a2200373 i 4500 ebr10777794 CaPaEBR m o d cr cn||||||||| 111102t20132013sz a ob 001 0 eng d 9783038139201 (e-book) 9783037855393 CaPaEBR eng rda pn CaPaEBR (OCoLC)852123701 T174.7 .I586 2013eb International Conference on Advanced Micro-Device Engineering (3rd : 2011 : Kiry�u-shi, Japan) Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Sumio Hosaka. Durnten-Zurich, Switzerland : Trans Tech Publications, [2013] �2013 1 online resource (277 pages) : illustrations. text rdacontent computer rdamedia online resource rdacarrier Key engineering materials ; 534 Includes bibliographical references and indexes. Description based on online resource; title from PDF title page (ebrary, viewed October 31, 2013). Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Microtechnology Congresses. Mechatronics Congresses. Electronic books. Hosaka, Sumio. ebrary. http://site.ebrary.com/lib/rucke/Doc?id=10777794 An electronic book accessible through the World Wide Web; click to view 131403 131403