selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan International Conference on Advanced Micro-Device Engineering 2011 : Kiry�u-shi, Japan) creator Hosaka, Sumio. text bibliography Electronic books. sz 2013 2013 monographic eng 1 online resource (277 pages) : illustrations. edited by Sumio Hosaka. Includes bibliographical references and indexes. Microtechnology Congresses Mechatronics Congresses T174.7 .I586 2013eb 9783038139201 (e-book) http://site.ebrary.com/lib/rucke/Doc?id=10777794 http://site.ebrary.com/lib/rucke/Doc?id=10777794 CaPaEBR 111102 ebr10777794 eng