TY  - BOOK
AU  - Hosaka,Sumio
ED  - International Conference on Advanced Micro-Device Engineering
TI  - Advanced micro-device engineering III: selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan 
SN  - 9783038139201 (e-book)
AV  - T174.7 .I586 2013eb
PY  - 2013///]
CY  - Durnten-Zurich, Switzerland
PB  - Trans Tech Publications
KW  - Microtechnology
KW  - Congresses
KW  - Mechatronics
KW  - Electronic books
N1  - Includes bibliographical references and indexes
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10777794
ER  -