@book{13786,
	author = {Tabata, Osamu. and ebrary, Inc.},
	title = {Reliability of MEMS},
	publisher = {Wiley-VCH,},
	year = {2013.},
	series = {Advanced micro & nanosystems},
	address = {Weinheim :},
	note = {First edition 2007.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10682369}
}