01286nam a2200325 a 4500001001200000003000800012006001900020007001500039008004100054020001800095040002100113035002100134050002400155082001800179245013000197260003400327300002300361490003300384500002400417504005100441533015200492650004900644655002900693700001900722700002500741710001700766830003400783856012600817999001700943ebr10682369CaPaEBRm        u        cr cn|||||||||130410s2013    gw a    sb    001 0 eng d  z9783527335015  aCaPaEBRcCaPaEBR  a(OCoLC)84754393214aTK7875b.R45 2013eb04a539.6011322300aReliability of MEMSh[electronic resource] :btesting of materials and devices /cedited by Osamu Tabata, Toshiyuki Tsuchiya.  aWeinheim :bWiley-VCH,c2013.  axx, 303 p. :bill.1 aAdvanced micro & nanosystems  aFirst edition 2007.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectromechanical systemsxReliability. 7aElectronic books.2local1 aTabata, Osamu.1 aTsuchiya, Toshiyuki.2 aebrary, Inc. 0aAdvanced micro & nanosystems.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10682369zAn electronic book accessible through the World Wide Web; click to view  c13786d13786