TY  - BOOK
AU  - Gonz�alez-Elipe,A.R.
AU  - Yubero,F.
AU  - Sanz,J.M.
ED  - ebrary, Inc.
TI  - Low energy ion assisted film growth
AV  - QC176.84.R3 G65 2003eb
PY  - 2003///
CY  - London, Singapore, River Edge, NJ
PB  - Imperial College Press, Distributed by World Scientific
KW  - Thin films
KW  - Design and construction
KW  - Effect of radiation on
KW  - Ion bombardment
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10255526
ER  -