01316nam a2200313Ia 4500001001200000003000800012006001900020007001500039008004100054020001500095040002100110035002100131050002800152100002900180245011200209260011200321300002400433504005100457533015200508650004100660650004000701650002100741655002900762700001500791700003600806710001700842856012600859999001700985ebr10255526CaPaEBRm        u        cr cn|||||||||030711s2003    enka    sb    001 0 eng d  z1860943519  aCaPaEBRcCaPaEBR  a(OCoLC)26111489714aQC176.84.R3bG65 2003eb1 aGonz�alez-Elipe, A. R.10aLow energy ion assisted film growthh[electronic resource] /cA.R. Gonz�alez-Elipe, F. Yubero, J.M. Sanz.  aLondon :bImperial College Press ;aSingapore ;aRiver Edge, NJ :bDistributed by World Scientific,cc2003.  axiv, 283 p. :bill.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aThin filmsxDesign and construction. 0aThin filmsxEffect of radiation on. 0aIon bombardment. 7aElectronic books.2local1 aYubero, F.1 aSanz, J. M.q(Jos�e Mar�ia)2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10255526zAn electronic book accessible through the World Wide Web; click to view  c14856d14856