01763nam a2200337 a 4500 ebr10671590 CaPaEBR m u cr cn||||||||| 101013s2011 enka sb 001 0 eng d 2010040731 9781848212022 (hardback) 184821202X (hardback) 9781118621233 (e-book) CaPaEBR CaPaEBR (OCoLC)842854719 TK7872.M3 L58 2011eb 621.3815/31 22 Lithography [electronic resource] : main techniques / edited by Stefan Landis. London : ISTE ; Hoboken, N.J. : Wiley, 2011. xxv, 377 p. : ill. (some col.) Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. Includes bibliographical references and index. "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher. Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Microlithography. Electronic books. local Landis, Stefan. ebrary, Inc. http://site.ebrary.com/lib/rucke/Doc?id=10671590 An electronic book accessible through the World Wide Web; click to view 163541 163541