Lithography
main techniques
Landis, Stefan.
ebrary, Inc
text
bibliography
Electronic books.
enk
London
Hoboken, N.J
ISTE
Wiley
2011
monographic
eng
xxv, 377 p. : ill. (some col.)
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
edited by Stefan Landis.
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Microlithography
TK7872.M3 L58 2011eb
621.3815/31
http://site.ebrary.com/lib/rucke/Doc?id=10671590
http://site.ebrary.com/lib/rucke/Doc?id=10671590
CaPaEBR
101013
ebr10671590