@book{163886,
	author = {Ree, Moonhor. and Yoon, Jinhwan. and ebrary, Inc.},
	title = {Low-k nanoporous interdielectrics},
	publisher = {Nova Science Publishers,},
	year = {c2010.},
	series = {Nanotechnology science and technology},
	address = {Hauppauge, N.Y. :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10675006}
}