01527nam a2200313 a 4500001001200000003000800012006001900020007001500039008004100054010001700095020001500112040002100127035002000148050002800168245034600196260005500542300001000597490002300607504004100630533015200671650005700823650004700880650005700927655002900984710001701013830003801030856012601068999001901194ebr10056959CaPaEBRm        u        cr cn|||||||||961029s1996    dcu     sb    100 0 eng    z   96070732   z0309055911  aCaPaEBRcCaPaEBR  a(OCoLC)4347562514aTK7871.85b.D374 1996eb00aDatabase needs for modeling and simulation of plasma processingh[electronic resource] /cPanel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.  aWashington, D.C. :bNational Academy Press,c1996.  a64 p.1 aThe compass series  aIncludes bibliographical references.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aSemiconductorsxDesign and constructionvCongresses. 0aPlasma engineeringxDatabasesvCongresses. 0aPlasma engineeringxComputer simulationvCongresses. 7aElectronic books.2local2 aebrary, Inc. 0aCompass series (Washington, D.C.)40uhttp://site.ebrary.com/lib/rucke/Doc?id=10056959zAn electronic book accessible through the World Wide Web; click to view  c172117d172117