@book{176159,
	author = {Ekwall, Britt. and ebrary, Inc.},
	title = {Micro electro mechanical systems (MEMS)},
	publisher = {Nova Science Publishers,},
	year = {c2010.},
	series = {Nanotechnology science and technology},
	address = {Hauppauge, N.Y. :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10671225}
}