01426nam a2200301 a 4500 ebr10055392 CaPaEBR m u cr cn||||||||| 911004s1991 dcua s 000 0 eng 91066812 0309045975 CaPaEBR CaPaEBR (OCoLC)43475627 TA2005 .N37 1991eb 621.044 20 National Research Council (U.S.). Panel on Plasma Processing of Materials. Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C. : National Academy Press, 1991. xii, 75 p. : ill. Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Plasma engineering. Microelectronics Materials Effect of radiation on. Surfaces (Technology) Electronic books. local ebrary, Inc. http://site.ebrary.com/lib/rucke/Doc?id=10055392 An electronic book accessible through the World Wide Web; click to view 178574 178574