TY  - BOOK
ED  - National Research Council (U.S.).
ED  - ebrary, Inc.
TI  - Plasma processing of materials: scientific opportunities and technological challenges 
AV  - TA2005 .N37 1991eb
U1  - 621.044 20
PY  - 1991///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Plasma engineering
KW  - Microelectronics
KW  - Materials
KW  - Effect of radiation on
KW  - Surfaces (Technology)
KW  - Electronic books
KW  - local
N1  - Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10055392
ER  -