01426nam a2200301 a 4500001001200000003000800012006001900020007001500039008004100054010001700095020001500112040002100127035002000148050002400168082001600192110008000208245030800288260005500596300002300651533015200674650002400826650005700850650002600907655002900933710001700962856012600979999001901105ebr10055392CaPaEBRm        u        cr cn|||||||||911004s1991    dcua    s     000 0 eng    z   91066812   z0309045975  aCaPaEBRcCaPaEBR  a(OCoLC)4347562714aTA2005b.N37 1991eb04a621.0442202 aNational Research Council (U.S.).bPanel on Plasma Processing of Materials.10aPlasma processing of materialsh[electronic resource] :bscientific opportunities and technological challenges /cPanel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.  aWashington, D.C. :bNational Academy Press,c1991.  axii, 75 p. :bill.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aPlasma engineering. 0aMicroelectronicsxMaterialsxEffect of radiation on. 0aSurfaces (Technology) 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10055392zAn electronic book accessible through the World Wide Web; click to view  c178574d178574