@book{183985,
	author = {Wong, Terence K. S. and ebrary, Inc.},
	title = {Semiconductor strain metrology},
	publisher = {Bentham Science,},
	year = {[2012]},
	address = {[Saif Zone, Sharjah, U.A.E] ;},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10570978}
}