@book{185489,
	author = {Ma, Xu, and Arce, Gonzalo R. and ebrary, Inc.},
	title = {Computational lithography},
	publisher = {Wiley-Blackwell,},
	year = {2010.},
	series = {Wiley series in pure and applied optics},
	address = {Oxford :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10419114}
}