TY  - BOOK
AU  - Ma,Xu
AU  - Arce,Gonzalo R.
ED  - ebrary, Inc.
TI  - Computational lithography
T2  - Wiley series in pure and applied optics
AV  - TK7872.M3 M3 2010eb
U1  - 621.381531 22
PY  - 2010///
CY  - Oxford
PB  - Wiley-Blackwell
KW  - Microlithography
KW  - Mathematics
KW  - Integrated circuits
KW  - Design and construction
KW  - Photolithography
KW  - Semiconductors
KW  - Etching
KW  - Resolution (Optics)
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10419114
ER  -