@book{195830,
	author = {International Symposium on Silicon Science and Hanaizumi, Osamu. and Gunma Daigaku. and International Conference on Advanced Micro-Device Engineering},
	title = {Silicon science and advanced micro-device engineering I},
	publisher = {Trans Tech Publications,},
	year = {2011.},
	address = {Stafa-Zurich ;},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10604228}
}