02743nam a2200529 a 4500 ebr10604228 CaPaEBR m u cr cn||||||||| 120510s2011 sz a sb 101 0 eng d 2012405162 9780878492176 (pbk.) 0878492178 (pbk.) 9780878492176 9783038134817 (e-book) CaPaEBR CaPaEBR (OCoLC)815479009 TK7871.15.S55 I585 2009eb 621.381 23 International Symposium on Silicon Science (5th : 2009 : Kiry�u-shi, Japan) Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno. 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011. xii, 282 p. : ill. Key engineering materials, 1013-9826 ; v. 459 Includes bibliographical references and indexes. Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Silicon Congresses. Nanostructures Congresses. Microelectronics Congresses. Electronic books. local Hanaizumi, Osamu. Unno, Masafumi. Gunma Daigaku. International Education and Research Center for Silicon Science. Gunma Daigaku. Advanced Technology Research Center. ebrary, Inc. International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiry�u-shi, Japan) http://site.ebrary.com/lib/rucke/Doc?id=10604228 An electronic book accessible through the World Wide Web; click to view 195830 195830