Silicon science and advanced micro-device engineering I
selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
5th International Symposium on Silicon Science
Fifth International Symposium on Silicon Science
International Symposium on Silicon Science
1st International Conference on Advanced Micro-Device Engineering
First International Conference on Advanced Micro-Device Engineering
International Conference on Advanced Micro-Device Engineering
ISSS & AMDE 2009
ISSS 2009
AMDE 2009
International Symposium on Silicon Science 2009 : Kiry�u-shi, Japan)
creator
Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku
International Education and Research Center for Silicon Science.
Gunma Daigaku
Advanced Technology Research Center.
ebrary, Inc
International Conference on Advanced Micro-Device Engineering 2009 : Kiry�u-shi, Japan)
text
bibliography
conference publication
Electronic books.
sz
Stafa-Zurich
Enfield, N.H
Trans Tech Publications
2011
monographic
eng
xii, 282 p. : ill.
edited by Osamu Hanaizumi and Masafumi Unno.
Includes bibliographical references and indexes.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Silicon
Congresses
Nanostructures
Congresses
Microelectronics
Congresses
TK7871.15.S55 I585 2009eb
621.381
Key engineering materials, v. 459
http://site.ebrary.com/lib/rucke/Doc?id=10604228
http://site.ebrary.com/lib/rucke/Doc?id=10604228
CaPaEBR
120510
ebr10604228