TY  - BOOK
AU  - Hanaizumi,Osamu
AU  - Unno,Masafumi
ED  - International Symposium on Silicon Science
ED  - Gunma Daigaku.
ED  - Gunma Daigaku.
ED  - ebrary, Inc.
ED  - International Conference on Advanced Micro-Device Engineering
TI  - Silicon science and advanced micro-device engineering I: selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan 
AV  - TK7871.15.S55 I585 2009eb
U1  - 621.381 23
PY  - 2011///
CY  - Stafa-Zurich, Enfield, N.H.
PB  - Trans Tech Publications
KW  - Silicon
KW  - Congresses
KW  - Nanostructures
KW  - Microelectronics
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and indexes; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10604228
ER  -