<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>01991nam a2200385 a 4500</leader>
  <controlfield tag="001">ebr10540838</controlfield>
  <controlfield tag="003">CaPaEBR</controlfield>
  <controlfield tag="006">m        u        </controlfield>
  <controlfield tag="007">cr cn|||||||||</controlfield>
  <controlfield tag="008">120128s2011    ohua    sbf   001 0 eng d</controlfield>
  <datafield tag="010" ind1=" " ind2=" ">
    <subfield code="z">  2012359075</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="z">161503725X</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="z">9781615037254</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="z">9781615037261 (e-book)</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">CaPaEBR</subfield>
    <subfield code="c">CaPaEBR</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(OCoLC)771901447</subfield>
  </datafield>
  <datafield tag="050" ind1="1" ind2="4">
    <subfield code="a">TK7871</subfield>
    <subfield code="b">.M52 2011eb</subfield>
  </datafield>
  <datafield tag="082" ind1="0" ind2="4">
    <subfield code="a">621.381</subfield>
    <subfield code="2">23</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
    <subfield code="a">Microelectronics failure analysis</subfield>
    <subfield code="h">[electronic resource] :</subfield>
    <subfield code="b">desk reference /</subfield>
    <subfield code="c">edited by Richard J. Ross.</subfield>
  </datafield>
  <datafield tag="250" ind1=" " ind2=" ">
    <subfield code="a">6th ed.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Materials Park, Ohio :</subfield>
    <subfield code="b">ASM International,</subfield>
    <subfield code="c">c2011.</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xi, 660 p. :</subfield>
    <subfield code="b">ill.</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographical references and indexes.</subfield>
  </datafield>
  <datafield tag="505" ind1="0" ind2=" ">
    <subfield code="a">section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information.</subfield>
  </datafield>
  <datafield tag="533" ind1=" " ind2=" ">
    <subfield code="a">Electronic reproduction.</subfield>
    <subfield code="b">Palo Alto, Calif. :</subfield>
    <subfield code="c">ebrary,</subfield>
    <subfield code="d">2011.</subfield>
    <subfield code="n">Available via World Wide Web.</subfield>
    <subfield code="n">Access may be limited to ebrary affiliated libraries.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Electronics</subfield>
    <subfield code="x">Materials</subfield>
    <subfield code="x">Testing</subfield>
    <subfield code="v">Handbooks, manuals, etc.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microelectronics</subfield>
    <subfield code="x">Materials</subfield>
    <subfield code="x">Testing</subfield>
    <subfield code="v">Handbooks, manuals, etc.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microelectronics</subfield>
    <subfield code="x">Materials</subfield>
    <subfield code="x">Defects</subfield>
    <subfield code="v">Handbooks, manuals, etc.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Electronic apparatus and appliances</subfield>
    <subfield code="x">Testing</subfield>
    <subfield code="v">Handbooks, manuals, etc.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Semiconductors</subfield>
    <subfield code="x">Defects</subfield>
    <subfield code="v">Handbooks, manuals, etc.</subfield>
  </datafield>
  <datafield tag="655" ind1=" " ind2="7">
    <subfield code="a">Electronic books.</subfield>
    <subfield code="2">local</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Ross, Richard J.</subfield>
  </datafield>
  <datafield tag="710" ind1="2" ind2=" ">
    <subfield code="a">ebrary, Inc.</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="0">
    <subfield code="u">http://site.ebrary.com/lib/rucke/Doc?id=10540838</subfield>
    <subfield code="z">An electronic book accessible through the World Wide Web; click to view</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">246113</subfield>
    <subfield code="d">246113</subfield>
  </datafield>
</record>
