@book{27041,
	author = {Kaariainen, Tommi. and ebrary, Inc.},
	title = {Atomic layer deposition},
	publisher = {John Wiley & Sons,},
	year = {c2013.},
	address = {Hoboken, NJ :},
	edition = {2nd ed.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10715316}
}