01338nam a2200349Ia 4500 ebr10715316 CaPaEBR m o u cr cn||||||||| 130422s2013 njua sb 001 0 eng d 2013016209 9781118062777 (cloth : alk. paper) 9781118747421 (ebook) CaPaEBR CaPaEBR (OCoLC)841199237 TS695 .K33 2013eb 620/.5 23 Kaariainen, Tommi. Atomic layer deposition [electronic resource] : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.]. 2nd ed. Hoboken, NJ : John Wiley & Sons, c2013. xv, 253 p. : ill. Includes bibliographical references and index. Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books. local ebrary, Inc. http://site.ebrary.com/lib/rucke/Doc?id=10715316 An electronic book accessible through the World Wide Web; click to view 27041 27041