@book{32231,
	author = {Chen, Francis F., and National Research Council (U.S.).},
	title = {Plasma processing and processing science},
	publisher = {National Academy Press,},
	year = {1995.},
	series = {NRL strategic series},
	address = {Washington, D.C. :},
	note = {Committee chair:  Francis F. Chen.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10071430}
}