@book{32495,
	author = {Baltes, Henry. and ebrary, Inc.},
	title = {Enabling technologies for MEMS and nanodevices},
	publisher = {Wiley,},
	year = {2013.},
	address = {Weinheim [Germany] :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10683273}
}